I own a 2000 525 DA with 106.000 kms and the same problem has started occruring. I went to my dealer and they said they would check with their computer : the petrol I use is not faulty (comes from different stations). They also said that injectors can't get dirty os used or whatever.
It does not happen all the time but from time to time under 900 rpm whether the engine is cold or not. The car is either really shaking or just slightly quivering...
All the maintenance is BMW

I will tell you.
----- >Jonnyblaze :What is the ICV ?